Plasma-based fabrication of nanomaterials and nanostructures is widely employed for top-downprocesses such as ULSI processing as well as bottom-up processes such as carbon nanotube production.
This research project explores frontier science of interactions between plasmas and nano-interfaces by focusing on novel features such as fluctuations of interactions due to the nanometer scale.
Plasma processing based on the science realizes highly precise top-down processes by suppressing fluctuations and well controlled self-organized bottom-up processes bycontrolling fluctuations.
This project aims to bring about an explosive development of fabrication technologies of nanomaterials and nanostructures.
|A01||Generation of Nano-Interface|
|(1)||Materials Science of Supercritical Cluster Plasma Fluid|
|(2)||Generation of plasmas in microscopically non-uniform multiphase media and its application|
|(3)||Science and applications of laser-induced multiphase plasmas|
|A02||Diagnostics of Nano-Interface|
|(1)||Bond engineering at nano-interfaces using nanoparticle plasmas|
|(2)||Reactive dynamics between plasma and microorganism|
|(3)||Influence of Particle and Heat Transportation on Plasma-Material Interactions|
|A03||Applications of Nano-Interface|
|(1)||Plasma-Surface Interactions during Plasma Etching for Nest-Generation Nanoscale Device Fabrication|
|(2)||Plasma Processing in Supercritical Fluid|
|(3)||Development of Plasma Processing Technology for Controlling Biological Activity of Fine Particles and Its Medical Application|
|(4)||Fundamental studies on the low-cost production of high-density BN films by laser-plasma synchronous vapor deposition methods for the next-generation transparent wide bandgap semiconductor materials|